Diaphragm vacuum pumps are single or multi-stage dry compressing vacuum pumps (diaphragm pumps having up to four stages are being manufactured). Here the circumference of a diaphragm is tensioned between a pump head and the casing wall (Fig. 2.1). It is moved in an oscillating way by means of a connecting rod and an eccentric. The pumping or compression chamber, the volume of which increases and decreases periodically, effects the pumping action. The valves are arranged in such a way that during the phase where the volume of the pumping chamber increases it is open to the intake line. During compression, the pumping chamber is linked to the exhaust line. The diaphragm provides a hermetic seal between the gear chamber and the pumping chamber so that it remains free of oil and lubricants (dry compressing vacuum pump). Diaphragm and valves are the only components in contact with the medium which is to be pumped. When coating the diaphragm with PTFE (Teflon) and when manufacturing the inlet and exhaust valves of a highly fluorinated elastomer as in the case of the DIVAC from Leybold, it is then possible to pump aggressive vapors and gases. It is thus well suited for vacuum applications in the chemistry lab.
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